As semiconductor devices become more complex, so do the methods for patterning them. Ever-smaller features at each new node require continuous advancements in photolithography techniques and ...

Layout decomposition represents a critical step in the semiconductor manufacturing process, whereby integrated circuit designs are partitioned into multiple layers or masks to overcome the inherent ...

IBM has devised materials and processes that could help improve the efficiency of chip production at the 7nm node and beyond. The company's researchers are working on challenges in the emerging field ...

(Nanowerk Spotlight) Traditional top-down patterning techniques – including photolithography, electron beam lithography, and ion beam lithography – have been employed to fabricate high-quality micro- ...

Soft lithography is a family of non-photolithographic techniques used for fabricating micro- and nanostructures using elastomeric stamps, molds, and conformable photomasks. Unlike conventional ...